Seriously, at that point, they didn't know he was the mastermind behind the separatist movement. His only "crime" was beeing a sith, or, in other words, having a different religion than jedi. So, this assault on Palpatin was nothing else than religious presecution. Sure, Jedi and Sith had their differences in the past, but is this a reason to kill or arrest this particular sith? To their knowledge, Palpatin had done nothing wrong. Therefor, Jedi are just religious fundamentalist and order 66 was maybe harsh, but perfectly reasonable to save the republic from this extremists.